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Here, we exploit the annealing based on femtosecond laser pulses. For that purpose, we implant fluorine ions at 54\u2009keV and chlorine ions at 74\u2009keV in diamond and perform micrometer precise annealing using focused femtosecond laser pulses at 800 \u00b1 (30)\u2009nm with different pulse numbers and repetition rates. In this way, we were able to create shallow spots with color centers of varying brightness.<\/jats:p>","DOI":"10.1063\/5.0143922","type":"journal-article","created":{"date-parts":[[2023,6,6]],"date-time":"2023-06-06T17:00:21Z","timestamp":1686070821000},"update-policy":"http:\/\/dx.doi.org\/10.1063\/aip-crossmark-policy-page","source":"Crossref","is-referenced-by-count":0,"title":["Combining femtosecond laser annealing and shallow ion implantation for local color center creation in diamond"],"prefix":"10.1063","volume":"122","author":[{"ORCID":"http:\/\/orcid.org\/0000-0003-2799-6680","authenticated-orcid":false,"given":"Johannes","family":"Engel","sequence":"first","affiliation":[{"name":"Faculty of Physics and Earth Sciences, Felix Bloch Institute for Solid State Physics, Applied Quantum Systems, Leipzig University 1 , Linn\u00e9strasse 5, Leipzig 04103, Germany"}]},{"ORCID":"http:\/\/orcid.org\/0000-0001-9270-749X","authenticated-orcid":false,"given":"Kaushalya","family":"Jhuria","sequence":"additional","affiliation":[{"name":"Accelerator Technology and Applied Physics Division, Lawrence Berkeley National Laboratory 2 , Berkeley, California 94720, USA"}]},{"ORCID":"http:\/\/orcid.org\/0000-0002-4828-1193","authenticated-orcid":false,"given":"Debanjan","family":"Polley","sequence":"additional","affiliation":[{"name":"Materials Sciences Division, Lawrence Berkeley National Laboratory 3 , Berkeley, California 94720, USA"},{"name":"Department of Electrical Engineering and Computer Sciences, University of California 4 , Berkeley, California 94720, USA"}]},{"given":"Tobias","family":"L\u00fchmann","sequence":"additional","affiliation":[{"name":"Faculty of Physics and Earth Sciences, Felix Bloch Institute for Solid State Physics, Applied Quantum Systems, Leipzig University 1 , Linn\u00e9strasse 5, Leipzig 04103, Germany"}]},{"ORCID":"http:\/\/orcid.org\/0000-0002-6065-6410","authenticated-orcid":false,"given":"Manuel","family":"Kuhrke","sequence":"additional","affiliation":[{"name":"Faculty of Physics and Earth Sciences, Felix Bloch Institute for Solid State Physics, Applied Quantum Systems, Leipzig University 1 , Linn\u00e9strasse 5, Leipzig 04103, Germany"}]},{"ORCID":"http:\/\/orcid.org\/0000-0002-8637-4876","authenticated-orcid":false,"given":"Wei","family":"Liu","sequence":"additional","affiliation":[{"name":"Accelerator Technology and Applied Physics Division, Lawrence Berkeley National Laboratory 2 , Berkeley, California 94720, USA"}]},{"ORCID":"http:\/\/orcid.org\/0000-0002-4541-0156","authenticated-orcid":false,"given":"Jeffrey","family":"Bokor","sequence":"additional","affiliation":[{"name":"Materials Sciences Division, Lawrence Berkeley National Laboratory 3 , Berkeley, California 94720, USA"},{"name":"Department of Electrical Engineering and Computer Sciences, University of California 4 , Berkeley, California 94720, USA"}]},{"ORCID":"http:\/\/orcid.org\/0000-0003-4046-9252","authenticated-orcid":false,"given":"Thomas","family":"Schenkel","sequence":"additional","affiliation":[{"name":"Accelerator Technology and Applied Physics Division, Lawrence Berkeley National Laboratory 2 , Berkeley, California 94720, USA"}]},{"ORCID":"http:\/\/orcid.org\/0000-0001-5841-6293","authenticated-orcid":false,"given":"Ralf","family":"Wunderlich","sequence":"additional","affiliation":[{"name":"Faculty of Physics and Earth Sciences, Felix Bloch Institute for Solid State Physics, Applied Quantum Systems, Leipzig University 1 , Linn\u00e9strasse 5, Leipzig 04103, Germany"},{"name":"Accelerator Technology and Applied Physics Division, Lawrence Berkeley National Laboratory 2 , Berkeley, California 94720, USA"}]}],"member":"317","published-online":{"date-parts":[[2023,6,6]]},"reference":[{"key":"2023081121533793200_c1","doi-asserted-by":"publisher","first-page":"1","volume":"528","year":"2013","journal-title":"Phys. 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